The benchtop X-ray diffractometer equipped with a one dimensional detector was developed to achieve higher sensitivity analysis. Developed variable knife edge was used as a countermeasure for unwanted scattering. High sensitivity analysis was achieved by equipping a 600 W X-ray tube and a one dimensional detector. Also, a multifaceted X-ray analysis using various X-ray analysis techniques was applied for environmental materials. Crystalline phases of minor elements in a municipal solid waste incineration fly ash classified into each particle size were estimated by confirming correlations between concentrations of major and minor elements. Chemical forms of soluble as chloride and insoluble as amorphous content, free, and oxide phase content forms of radioactive cesium in a municipal solid waste incineration fly ash were analyzed.